ID | 原文 | 译文 |
51417 | 通过调节平台位移控制光斑入射位置, | The incident position of the light spot is controlled by adjusting the displacement of the platform. |
51418 | 建立光栅位移与反射光谱一级衍射中心波长之间的相关关系,实现波长对位移的编码。 | Besides, the correlation between the grating displacement and the wavelength of the reflection spectrum first-order diffraction center is established to realize the wavelength coding of the displacement. |
51419 | 平台移动范围为0~20 mm,步长为2 mm,往返重复测量6次,记录各位移点处的中心波长,标定传感器的位移特性。 | The platform movement range is 0~20 mm, with step length of 2 mm, and the round trip repeated measurement is made for 6 times. The central wavelength at each shift point is recorded and the displacement characteristics of the sensor are calibrated. |
51420 | 针对各位移点重复测量产生的中心波长数据进行误差分析, | Based on the error analysis of the central wavelength data generated by repeated measurements at each shift point, |
51421 | 采用贝塞尔公式结合别捷尔斯法分析各点多次测量数据的标准差, | the standard deviation of multiple measurements at each point is analyzed by using Bessel formula combined with the Pieters method. |
51422 | 并结合莱以特(3σ)准则进一步判定数据的可靠性。 | The reliability of the data is further determined by combining with the 3σ criteria. |
51423 | 实验结果表明,该传感系统无系统误差和粗大误差; | The experimental results show that the sensor system has no systematic error and gross error. |
51424 | 波长与位移呈线性变化,多次重复线性度优于0.9946, | Also, the wavelength and displacement of the sensor change linearly, and the linearity of multiple repetitions is better than 0. 9946. |
51425 | 传感器全量程平均位移灵敏度为16.67 nm/mm, | The average displacement sensitivity of the sensor's full range is 16. 67 nm/mm. |
51426 | 为基于变栅距光栅位移传感系统的研究提供了一定的参考。 | The content of this paper can provide a certain research reference for displacement sensing system based on varied line-space grating. |