ID 原文 译文
51417 通过调节平台位移控制光斑入射位置， The incident position of the light spot is controlled by adjusting the displacement of the platform.
51418 建立光栅位移与反射光谱一级衍射中心波长之间的相关关系，实现波长对位移的编码。 Besides, the correlation between the grating displacement and the wavelength of the reflection spectrum first-order diffraction center is established to realize the wavelength coding of the displacement.
51419 平台移动范围为0～20 mm，步长为2 mm，往返重复测量6次，记录各位移点处的中心波长，标定传感器的位移特性。 The platform movement range is 0～20 mm, with step length of 2 mm, and the round trip repeated measurement is made for 6 times. The central wavelength at each shift point is recorded and the displacement characteristics of the sensor are calibrated.
51420 针对各位移点重复测量产生的中心波长数据进行误差分析， Based on the error analysis of the central wavelength data generated by repeated measurements at each shift point,
51421 采用贝塞尔公式结合别捷尔斯法分析各点多次测量数据的标准差， the standard deviation of multiple measurements at each point is analyzed by using Bessel formula combined with the Pieters method.
51422 并结合莱以特(3σ)准则进一步判定数据的可靠性。 The reliability of the data is further determined by combining with the 3σ criteria.
51423 实验结果表明，该传感系统无系统误差和粗大误差; The experimental results show that the sensor system has no systematic error and gross error.
51424 波长与位移呈线性变化，多次重复线性度优于0.9946， Also, the wavelength and displacement of the sensor change linearly, and the linearity of multiple repetitions is better than 0. 9946.
51425 传感器全量程平均位移灵敏度为16.67 nm/mm， The average displacement sensitivity of the sensor's full range is 16. 67 nm/mm.
51426 为基于变栅距光栅位移传感系统的研究提供了一定的参考。 The content of this paper can provide a certain research reference for displacement sensing system based on varied line-space grating.