ID 原文 译文
44146 由于 LPCVD-Si3N4 具有良好的介电特性,常用作 AlGaN/GaN 高电子迁移率场效应晶体管 ( HEMT) 的栅介质, Due to the excellent dielectric property, LPCVD-Si3N4 material is commonly used as gatedielectric of AlGaN/GaN high electron mobility transistor (HEMT) .
44147 然而在高温生长中,易造成 GaN 界面 Ga N 的扩散。 However, it is easy to cause the diffusion of Ga and N on GaN interface in high-temperature growth ambient.
44148 针对此问题,提出了一种采用 SiON/Si3N4 复合绝缘材料作为 HEMT 器件栅介质的方法, A method of using SiON/Si3N4 composite insulating material as gate dielectric of HEMT devices was proposed to solve these problems.
44149 制备了高质量的AlGaN/GaN 金属-绝缘层-半导体高电子迁移率晶体管 ( MISHEMT) 器件, The high quality AlGaN/GaN metal-insulator-semiconductor HEMT (MISHEMT) was fabricated.
44150 并进行了直流测试。 And the DC test was carried out.
44151 测试结 明,在 18 V 时,器件的阈值回滞仅为 150 mV,其特征导通电阻为1.74 mΩ·cm2 ( Vgs = 2 V) ,其击穿电压达到 805 V ( Ids = 100 μA/mm) The test results show that when the gate voltage is up to 18 V, the threshold hysteresis of the device is 150 mV, the specific on-resistance is 1.74 mΩ·cm2 (Vgs = 2 V) and the highbreakdown voltage reaches 805 V (Ids = 100 μA/mm) .
44152 多频率 C-V 测试显示,界面态密度可低至 2. 9×1013 eV-1·cm-2。 The multi-frequency C-V test exhibits the interface-state density is as low as 2.9×1013 eV-1·cm-2.
44153 因此,这种采用 SiON/Si3N4 复合绝缘材料作为栅介质的方法,在改善器件的阈值回滞、击穿电压和界面态密度等方面效果显著。 Thus, it is significantly effective to improve thethreshold hysteresis, increase the breakdown voltage, and reduce the interface state density by usingSiON/Si3N4 composite insulating material as gate dielectric.
44154 设计了一款半桥结构的焊接式绝缘栅双极型晶体管 ( IGBT) 模块。 A welded insulated gate bipolar transistor (IGBT) module with half bridge structure wasdesigned.
44155 模块内部电路整体布局设计为 IGBT 的正负母线端子在直接覆铜 ( DBC) 板的一端,DBC 板的另一端为 IGBT 的交流输出端,两块 DBC 板通过键合线连接在一起,形成半桥结构。 The overall layout design of the module internal circuit was that the positive and negative busterminal of the IGBT was placed at one end of the direct bonding copper (DBC) , and the other end ofthe DBC was the AC output, the two DBCs were connected by bonding wires to form a half bridge structure.