ID 原文 译文
43806 基 于 三 维 闪 存 ( 3D NAND) 中 后 段(BEOL) W 的自对准双重图形化 ( SADP) 工艺，利用湿法刻蚀的方法在 W 化学机械平坦化(CMP) 之后去除 SiO2 介质层， But the manufacture process has many difficulties.Based on the W self-aligned double patterning(SADP) process of the back-end-of-line (BEOL) of 3D NAND flash, the wet etching method was usedto remove the SiO2 dielectric layer after W chemical mechanical planarization (CMP).
43807 然后再利用化学气相淀积 (CVD) 法淀积一层台阶覆盖率较低的介质在金属互连线层内形成空气隙。 Then the chemicalvapor deposition (CVD) method was used to deposit a dielectric film with low step coverage to form anair-gap within the metal interconnect layer.
43808 采用空气隙结构代替原来的 SiO2 介质层可降低约 37. 4%的寄生电容，且薄膜的台阶覆盖率会进一步降低电容。 Using air-gap instead of the original SiO2 dielectric layer canachieve a 37.4% reduction in parasitic capacitance, and the step coverage of the film further affects thecapacitance reduction.
43809 TCAD 仿真和电性能测试结果表明，采用该方法制备的空气隙结构可降低互连延迟。 The TCAD simulation and electrical test results show that the interconnect delaycan be reduced effectively by the air-gap structure prepared with this rnethod.
43810 针对微电容超声换能器 (CMUT) 微弱电流信号检测的要求，设计了一种用于 CMUT的前端专用集成电路———运算放大器 (OPA) 电路。 For the requirements of the detecting weak current signal of capacitive micromachined ultrasonic transducer (CMUT), an application special integrated circuit—operational amplifier (OPA) circuit for CMUT front-end was designed and fabricated.
43811 运算放大器电路采用两级放大结构，第一级采用全差分折叠－共源共栅结构，输出级采用 AB 类控制的轨到轨输出级， The proposed two-stage OPA circuit consisted of afull differential folded-cascode amplifier stage followed by a class AB rail-to-rail output stage.
43812 在运算放大器电路反相输入端和输出端通过一个反馈电阻实现 CMUT 电流信号到电压信号的转换。 A feedbackresistor was used between the inverting input and the output of the amplifier, which could convert the output current signal of the CMUT to a voltage signal.
43813 采用 GlobalFoundries 0. 18 μm 的标准 CMOS 工艺进行了仿真设计和流片，芯片尺寸为 226 μm×75 μm。 The OPA circuit was simulated and designed byGlobalFoundries 0.18 μm standard CMOS technology, and then it was taped out.The chip area is226 μm×75 μm.
43814 仿真结果表明，运算放大器的开环增益为 62 dB，单位增益带宽为 30 MHz，在 3 MHz 处的输入参考噪声电压为 2. 9 μV/Hz1/2，电路采用±3. 3 V 供电，静态功耗为 11 mW。 The simulation results show that the open loop gain of the operational amplifier is62 dB, the unity gain bandwidth is 30 MHz, and the input reference noise voltage is 2.9 μV/Hz1/2 at3 MHz.And the static power consumption of the OPA circuit is 11 mW with a ± 3.3 V power supplyvoltage.
43815 测试结果表明仿真与实测结果相符，该运算放大器电路能够实现 CMUT 微弱电流信号检测功能。 The test results show that the simulation results are in agreement with the experimental ones.TheOPA circuit can realize the weak current signal detection function of CMUT.