ID |
原文 |
译文 |
43196 |
使用 FA/O Ⅱ型螯合剂和 CAK 复合配置 ( 质量分数分别为 20%和 3%) 阻挡层抛光液,可以得到较高的 Cu 和TEOS 去除速率,Cu 和 TEOS 去除速率选择比为 1 ∶ 1. 8,碟形坑和蚀坑深度分别从 69. 8 nm 和45. 5 nm 修正为 25. 6 nm 和 16. 7 nm,铜表面粗糙度由原来的 7. 11 nm 降至 1. 27 nm。 |
When theFA/O Ⅱ type chelating agent and CAK (the mass fraction of 20% and 3% respectively) compound areused to configure barrier layer polishing slurry, a higher Cu and TEOS removal rate can be obtained.TheCu and TEOS removal rate selection ratio is 1 ∶ 1.8, the depth of the dishing pit and erosion pit are corrected from 69.8 nm and 45.5 nm to 25.6 nm and 16.7 nm, respectively, and the copper surface roughness reduces from 7.11 nm to 1.27 nm. |
43197 |
该阻挡层抛光液稳定时间为 72 h,其稳定性满足工业化要求。 |
The barrier layer polishing slurry has a stabilization time of 72 h, and its stability satisfies industrial requirements. |
43198 |
研究了抛光液 pH 值、酒石酸钾 ( PTH) 、双氧水 ( H2O2 ) 和硅溶胶对钴插塞和钛阻挡层的去除速率及选择比的影响,并讨论了前 3 种因素与钴和钛电偶腐蚀的变化关系。 |
The effects of pH values of the polishing solution, potassium tartrate hemihydrate(PTH) , hydrogen peroxide (H2O2) and silica sol on the removal rate and selection ratio of cobalt plugand titanium barrier layer were studied.The variation relationship among the first three factors and galvanic corrosion of cobalt and titanium was discussed. |
43199 |
采用正交抛光实验探讨了各因素对钴和钛抛光速率的主导度,利用塔菲尔曲线研究了各因素对钴和钛腐蚀电位差的 影 响 趋 势。 |
The dominant degree of each factor to the polishingrates of cobalt and titanium was studied by orthogonal polishing experiment.The Tafel curve was utilizedto study the influence tendency of various factors on the corrosion potential difference between cobalt andtitanium. |
43200 |
结 果 显 示,升 高 pH 值 ( 由 8 到 10 ) 可大幅降低钴的去除速率至27. |
The results show that increasing the pH value (from 8 to 10) can significantly reduce the removal rate of cobalt to 27. |
43201 |
7 nm /min,而对于钛的去除速率无明显影响;PTH 的引入可同时提高钴与钛的去除速率,并降低二者腐蚀电位差;H2O2 的增加可有效降低钴的去除速率而同时增大钛的去除速率。因此,升高 pH 值有利于实现钴和钛的去除速率一致性; |
7 nm /min, but has no obvious effect on the removal rate of titanium. |
43202 |
固定 pH 值而改变 PTH 和 H2O2 体积分数可实现钴与钛的去除速率及选择比可控。 |
The introduction of PTH can simultaneously increase the removal rates of cobalt and titanium and reduce the corrosion potential difference between them.The increase of H2O2 can effectively reduce the removal rate ofcobalt while increasing the removal rate of titanium.Therefore, increasing the pH value is conducive toachieving the consistency of the removal rates of cobalt and titanium, and changing the volume fractionsof PTH and H2O2 with fixed pH value can achieve the controllable removal rates and selection ratio of cobalt and titanium. |
43203 |
体异质结聚合物太阳电池是有机半导体太阳电池的重点研究领域,其中全聚合物太阳电池由于有着以下优点而受到广泛关注: |
Bulk heterojunction polymer solar cells have been the key research field of organic semiconductor solar cells. Among them, all-polymer solar cells have attracted extensive attention due to thefollowing advantages: |
43204 |
聚合物给体和聚合物受体的光吸收可调节范围大;太阳电池器件薄膜相对稳定;与大面积、大规模制造工艺兼容性好;太阳电池器件对外界环境不敏感,稳定性高。 |
the light absorption of polymer donors and polymer acceptors can be adjusted in awide range; the solar cell device thin film is relatively stable; it has good compatibility with large-areaand large-scale manufacturing processes; solar cell devices are insensitive to the external environment andhave high stability. |
43205 |
概述了全聚合物太阳电池的研究进展,介绍了全聚合物太阳电池的工作原理和获得高性能所面临的主要问题,重点探讨了优化全聚合物太阳电池性能的方法,主要包括活性层混合形态控制、给受体聚合物分子质量调控及制备工艺优化。 |
The research progress of all-polymer solar cells is reviewed.The working principles ofall-polymer solar cells and the main problems in achieving high performance are introduced.The methodsof optimizing the performance of all-polymer solar cells are emphatically discussed, mainly including themixture morphology control of the active layer, molecular weight regulation of the donor-acceptor polymerand the optimization of the preparation process.And the development prospects of all-polymer solar cellsare analyzed and predicted. |